Products Description
1200 ℃ slider-type dual-zone PECVD system
Technical Parameters
| Model | XW-DSP-1200℃ | XW-DSP-1200℃ | XW-DSP-1200℃ | XW-DSP-1200℃ | |
| -PECVD-I | -PECVD-II | -PECVD-III | -PECVD-IV | ||
| Power | 3KW | 3KW | 4KW | 4KW | |
| Furnace tube size(mm) | Dia 60(OD) X1800mm | Dia 80(OD) X1800mm | Dia 100(OD) X1800mm | Dia 120(OD) X1800mm | |
| Dimension | 1800X410X610 | 1800X410X610 | 1800X460X660 | 1800X460X660 | |
| Power supply voltage | 220V | ||||
| Phase number | Single-phase | ||||
| Control mode | Yudian temperature control | ||||
| 30 sections can only use PID temperature regulation. | |||||
| FP93 temperature control (from Japan) | |||||
| (Replace imported instruments, for an additional fee) | |||||
| 1,40 section program temperature control can be divided into 4,2,1 group program, if the program is divided into four groups, each program segment 10, | |||||
| 2,6 group PID control, low, medium and high temperature can each with a set of PID, such that each segment is capable of controlling the temperature is very accurate. | |||||
| Temperature control mode | Intelligent PID | ||||
| Burnout protection and display | |||||
| Yes | |||||
| Over-temperature protection | Yes | ||||
| Overcurrent protection | Yes | ||||
| Control accuracy | +/- 1 ℃ | ||||
| Trigger | Phase-shift trigger | ||||
| SCR | 106 / 16E Germany Simon Kang | ||||
| The 1.2 temperature zone max temperature | 1200 ℃ | ||||
| The 1.2 temperature zone | 1150 ℃ | ||||
| Rated temperature | |||||
| Heating rate | ≤30 ℃ / Min (Available upon request modification) | ||||
| Recommended heating rate | ≤15 ℃ / Min | ||||
| Thermocouple Type | K type | ||||
| The 1.2 temperature zone heating length | 205mm | ||||
| Surrounding surface temperature | ≤45℃ | ||||
| Plasma RF Power | Power output range | 0-500W | |||
| Maximum reflected power | 10W | ||||
| Signal frequency | 13.56MHZ ± 0.005% | ||||
| Noise | <30 dB | ||||
| Air cooling | cooling method | ||||
| Input Power | 208-240V 50 / 60HZ | ||||
| GX supply system main parameters | Standard range | Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM | |||
| (you can choose any scale) | |||||
| Accuracy | ± 1.5% | ||||
| Pressure drop | <0.01MPa | ||||
| Repeatability | ± 0.2% F.S | ||||
| Max | 3MP | ||||
| Operating pressure | |||||
| VS-0.1 exhaust system | power supply | 220V / 380V 380W | |||
| Pumping rate | 2L / S | ||||
| Resistance vacuum gauge | ZDR-I | ||||
| Vacuum measurement range | 0.1-10 5 Pa | ||||
| Vacuum pump | VRD-8 | ||||
| Corrugated pipe | KF25X1000mm | ||||
| Vacuum system | 10 -1Pa | ||||
