Products Description
1200 ℃ Turning type vacuum tube furnace
Technical Parameters
| Model | XW-DSP-1200℃-PECVDS | |
| Turning type vacuum tube furnace | ||
| Power | 3.5KW | |
| Furnace tube size(mm) | Dia 60(OD) X1200mm | |
| Dimension | 1300X420X1200 | |
| Power supply voltage | 220V | |
| Phase number | Single-phase | |
| Temperature control mode | Yudian temperature control | |
| 30 sections can only use PID temperature regulation. | ||
| FP93 temperature control (from Japan) | ||
| (Replace imported instruments, for an additional fee) | ||
| 1,40 section program temperature control can be divided into 4,2,1 group program, | ||
| if the program is divided into four groups, each program segment 10, | ||
| 2,6 group PID control, low, medium and high temperature can each with a set of PID, | ||
| such that each segment is capable of controlling the temperature is very accurate. | ||
| Trigger | Phase-shift trigger | |
| SCR | 106 / 16E Germany Simon Kang | |
| Max temperature | 1200 ℃ | |
| Rated temperature | 1100 ℃ | |
| Heating rate | ≤30 ℃/ Min (Available upon request modification) | |
| Control accuracy | +/- 1 ℃ | |
| Recommended heating rate | ≤15 ℃/ Min | |
| Heating length | 400mm | |
| Thermocouple Type | K type | |
| Certification | CE | |
| Surrounding surface temperature | ≤45℃ | |
| Turn the motor power | 40W | |
| Electric putter power | 40W | |
| Furnace can be tilted angle | -10 ~30 degrees | |
| Tube rotation rate | Continuously variable motor speed can be adjustable in 1-25 rev / min | |
| Plasma RF Power | Power output range | 0-500W |
| Maximum reflected power | 10W | |
| Signal frequency | 13.56MHZ ± 0.005% | |
| Noise | <30 dB | |
| Air cooling | cooling method | |
| Input Power | 208-240V 50 / 60HZ | |
| GX supply system main parameters | Standard range | Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, |
| 1,2,3,5,10SLM | ||
| (you can choose any scale) | ||
| Accuracy | ± 1.5% | |
| Pressure drop | <0.01MPa | |
| Repeatability | ± 0.2% F.S | |
| Max Operating pressure | 3MP | |
| VS-0.1 exhaust system | power supply | 220V / 380V 380W |
| Pumping rate | 2L / S | |
| Resistance vacuum gauge | ZDR-I | |
| Vacuum measurement range | 0.1-10 5 Pa | |
| Vacuum pump | VRD-8 | |
| Corrugated pipe | KF25X1000mm | |
| Vacuum system | 10 -1Pa | |
