Products Description
Structure: Mainly composed of cabin, valve and motion module, vacuum system, electronic control module, air compressor.
Function: Vaporize the plating material into atoms, molecules or ionize it into ions, and deposit it directly on the surface of the substrate.
The cabin can be customized according to the size of the substrate
Cu2++2e−→Cu
Technical Parameters
Technical parameters | |
Substrate | 200mmx200mm |
Cavity: Diameter: | 304 stainless steel. 400mm |
Pneumatic structure | Ultimate vacuum |
Spend | 0.7Pa |