Products Description
Product Structure: It is mainly composed of Y-axis marble linear motor module and Z-axis precision shift module, and also includes coating head, coating head adjustment module, injection module, air knife module and electronic control part.
Product Process: The selected coating is injected into the high-precision coating head through the injection pump, and the substrate is vacuum-adsorbed and positioned on the marble platform.
After the coating head is leveled, the linear motor platform loads the substrate and moves to complete the uniform coating of the substrate.
Customization:
- Coating gap detection system
- Multi-size blades, multi-specification gaskets
- In-situ heating
- Others method
Technical Parameters
| Technical parameters | |
| Substrate size Max | 300*300mm |
| Coating film uniformity | ±5% (100mm width) |
| Coating knife edge straightness | ≤2um/m |
| Coating head working surface straightness | ≤2um/m |
| Vertical axis positioning accuracy | ≤0.005mm |
| Platform flatness accuracy | Better than ±5um |
